Shanghai Seeyond Optoelectronics Co., Ltd.

Inspection/Process Equipment

Waveguide Inspection Equipment SY01WGT005

SY01WGT005

The SY01WGT005 waveguide inspection equipment helps AR waveguide manufacturers achieve full-dimensional, high-precision inspection of waveguide performance and defects, accurately intercepting dimensional deviation, sub-standard performance and hidden defects.It eliminates the missed and false detections of conventional inspection, significantly improves the consistency, stability and yield of waveguide products, and safeguards the performance and quality of end products.

● High-Accuracy Colorimeter + Projection System

● Multi-DOF Motion, Precise Pupil Alignment

● Programmable Flow, Standard + Custom Analysis

● High Compatibility

Features

High-Accuracy Colorimeter + Projection System

● Key optical modules (NED inspection lens, NED projection lens,high-brightness uniform illumination) developed in-house for waveguide/wafer inspection and production.

● Outstanding lens performance: MTF close to the diffraction limit, highcontrast; projection lens + illumination approach an ideal optical engine.

● Fast changeover: quick-release chart switching enables rapid switching between product types.

Multi-DOF Motion, Precise Pupil Alignment

●13-DOF long-travel adjustment system precisely aligns WG in-coupling and out-coupling in 6 DOF, greatly improving R&D verification efficiency.

●High-precision composite optical alignment keeps the spatial relationship of tester, sample and receiver highly consistent every time.


High Compatibility

●Stage supports vacuum chucking of full 12-inch wafers; adapter fixtures extend compatibility to 8-inch and 6-inch wafers.

●Interchangeable WG fixture tray also supports bare-piece waveguide inspection; one system covers both wafer-level and single-device-level inspection, reducing equipment investment.

Programmable Flow, Standard + Custom Analysis

●Loads multiple test-flow configuration files and recalls the matching test plan for each waveguide model for one-click automated inspection.

●Built-in standardized algorithms for efficiency, uniformity, MTF,checkerboard contrast ghosting and other key waveguide metrics; custom analysis items can be added on demand.


Product parameters

Project TypeProduct specifications/technical parameters
Basic product informationProduct modelSY01WGT005
Dimensions≤ 2250*1750*2500mm
Inspection targetDiffraction/geometric optical waveguide sheet
Loading and unloadingManual or automatic
Module alignmentMotorized
Power380V/21 KVA
Cleanliness class 1000
Software featuresDedicated waveguide inspection algorithms
Optical systemInspection moduleDFOV: 72°PPD: 126; Entrance pupil dia.: 1.0-5.0 mm (Xr, Y, Z, Xb)
Projection moduleDFOV: 72°; Aperture size: 1.0-5.0 mm

*Repeat accuracy

Application scenarios

●Performance inspection of waveguide pieces / wafers

●Support for new waveguide R&D


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